BW-Series

BW-Series - Accurate sub-nano-surface profiler with non-contact measurement

nikon metrology industrial microscopes white light interferometric microscope BW Series Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.

Benefits & features

Superior measurement performance

Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
Enables measurements with the same height resolution in a wide range of magnifications.
Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
Captures both an all-in-focus image and a surface height image.

Wide range of observation methods

The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescence observations are all possible

SiC Wafer: Sub-nano-level measurement in a wide range of magnifications

Type: BW-D501 system
Subject: Silicon Carbide (SiC) Wafer

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 2 5x BW Series

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 5x BW Series

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 10x BW Series

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 20x BW Series

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 50x BW Series

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 100x BW Series

Nano-level measurement of razor-edge with high-magnification lens

Subject: Razor-edge

nikon metrology industrial microscopes white light interferometric microscope razor edge BW Series

Surface roughness of paper (Synthetic, Plain, Gloss, Matte)

nikon metrology industrial microscopes white light interferometric microscope Surface roughness of synthetic paper BW Series Surface roughness of synthetic paper
Surface roughness of gloss paper
Surface roughness of plain paper
Surface roughness of matte paper

Surface roughness of ceramics

nikon metrology industrial microscopes white light interferometric microscope Surface roughness of ceramics BW Series

Precise surface measurements for micrometer-range rough surfaces

Type: BW-A501 system
Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition
Photos courtesy of: Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering

nikon metrology industrial microscopes white light interferometric microscope Precise surface measurement BW Series

IC package: Micrometer-range measurement in a wide range of magnifications

nikon metrology industrial microscopes white light interferometric microscope IC Package Micrometer range measurement in a wide range of magnifications BW Series

Height calibration with the NIST-certified VLSI standard

nikon metrology industrial microscopes white light interferometric microscope Certificate of calibration BW Series

BW-D501 system

nikon metrology industrial microscopes white light interferometric microscope BW D501 system BW Series

Specifications

	High Pixel Resolution Model
	BW-S501	BW-S502	BW-S503	BW-S505	BW-S506	BW-S507
Measurement optical system	Focus Variation with White Light Interferometry (FVWLI)
Height resolution (algorithm)	1pm (0.001 nm)
Step height measurement reproducibility	σ: 8nm / 8m step height measurement
Number of pixels	2046 x 2046, 1022 x 1022 (selectable via software)
Height measurement time	38 s, 16 s / 10 μm scan
Height measurement range	< 90 μm	< 20 mm		< 90 μm	< 20 mm
Measurement field size (using 2.5X)	< 4448 x 4448 μm*
Piezo actuator	Objective lens driven			Nosepiece driven
Z axis	Manual	Electric		Manual	Electric
XY axis	Manual		Electric	Manual		Electric
Software	Bridgelements® software modules

	High Speed Model
	BW-D501	BW-D502	BW-D503	BW-D505	BW-D506	BW-D507
Measurement optical system	Focus Variation with White Light Interferometry (FVWLI)
Height resolution (algorithm)	1 pm (0.001 nm)
Step height measurement reproducibility	σ8nm / 8m step height measurement
Number of pixels	510x510
Height measurement time	4 s / 10 μm scan
Height measurement range	< 90 μm	< 20 mm		< 90 μm	< 20 mm
Measurement field size	< 2015 x 2015 μm *
Piezo actuator	Objective lens driven			Nosepiece driven
Z axis	Manual	Electric		Manual	Electric
XY axis	Manual		Electric	Manual		Electric
Software	Bridgelements® software modules