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Non Contact Flatness Measurement Topmap Series TMS-500/500R

TMS 500R
Measure surface roughness and form tolerances. TMS 500R

The TopMap Pro.Surf+ offers the customized solution for all surface characterization requirements using parameters such as flatness, step heights, parallelism and roughness. All in all, the spatial resolution, the telecentric lens and the speed cut a very impressive figure indeed.

Check: Flatness, RA ,SA Step height
 
General Features TMS-500/ TMS-500-R
Measuring area 43.3 x 32.7 mm
Working distance 13 mm
Lateral optical resolution 16 um
Vertical resolution <1.45 nm
Vertical measuring range 70 mm
Extended measuring area 228 mm x 221 mm
Measuring principle Scanning white-light interferometry
Data formats Topography formats: SUR, ASCll
Export formats: qs-STAT, PDF, BMP, PNG, TIFF, GIF
  Typical Flatness Measurement
   Smooth Surfaces Rough Surfaces
Flatness deviation < 75 nm < 125 nm
Reproducibility 5 nm 10 nm
  Typical Step Height Measurement
Nominal step height 5 um 450 um 5000 um
Reproducibility 0.008 um 0.05 um 0.05 um
  Other features
Filters 3 Filters for adapting to different sample reflectivities;
Optical tool for automatically identifying measurement position
Roughness sensor
of TMS 500-R		 Measure range Imaging systems Working distance
150 um Confocal sensor 3.35 mm
Roughness measurement
with TMS 500-R		 Measurable roughness values
RA > 100 nm

 
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