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  3. WiX : Wafer Vision Inspection Handler

WiX : Wafer Vision Inspection Handler

WiX, Wafer Vision Inspection Handler offers advanced wafer inspection with sub-micron accuracy. It is an all-in-one platform designed for total defect control across wafer's top, inner, and back surfaces. Built for versatility and high scalability, it helps Foundries, IDMs and OSATs achieve world-class yields and reliability.
 
Model Type WiX Series
Wafer Input Type & Size
Raw Wafer: 150mm , 200mm , 300mm

Framed Wafer: 150mm , 200mm , 300mm

*Hoop Ring: Supportable
Wafer Carrier Type & Size Raw Wafer Cassette: 150mm , 200mm
FOUP / FOSB: 300mm (raw wafers)
Framed Wafer Cassette: 150mm , 200mm , 300mm
Vision Optics High Resolution Industrial Camera, High Accuracy Magnification Lens, Intelligent Autofocus, Multiple Illumination, Multiple Colour Filter
Magnification Lens
2X 5X 7.5X 10X
Automated Handling Mechanism Automated Wafer Handling & Inspection with

- Dual Robot Arm
- Dual Load Port
Smallest Accuracy 0.7 µm / pixel
Cleanroom Class

Class 100, Class 1000

With Ionizer and ULPA/HEPA Filter System

 
Lot & Wafer ID Traceability

External and Built-in Barcode Scanner: 1D, 2D Carcodes
Built-in OCR Scanner: Alphanumeric Codes

*Only manual loading available | Specifications are subject to change.

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