V510Ai Vision Pro

Smart 3D AOI System for Back-end Semiconductor Manufacturing

The V510Ai Vision Pro is an advanced Smart 3D Automated Optical Inspection (AOI) system engineered specifically for back-end semiconductor manufacturing. Equipped with an auxiliary SWIR (Short-Wave Infrared) vision system, it extends inspection capabilities beyond the visible light spectrum, enabling superior detection of internal defects that conventional optical inspection may miss.

Combined with ultra-high-resolution imaging and advanced AI technology, the system accurately detects inner die cracks and delivers highly reliable inspection results, even on challenging die surfaces. Designed for semiconductor production environments, the V510Ai Vision Pro also features an integrated HEPA filtration system to support cleanroom operation.

Key Features

• AI Smart Programming for faster inspection setup and simplified program creation
• AI Crack Detection for accurate identification of inner die cracks and micro defects
• Fully Automated Material Handling to improve productivity and reduce manual intervention
• Ultra-High Resolution Imaging for precise inspection of microscopic features
• Hybrid Vision System combining visible-light and SWIR imaging for enhanced defect detection