Microfocus source | Max. kV | Max. power | Focal spot size | Focal spot size at max power |
---|---|---|---|---|
225 kV Reflection target | 225 kV | 225 W | 3 µm up to 7 W | 225 µm at 225 W |
225 kV Rotating target option | 225 kV | 450 W | 10 µm up to 30 W | 160 µm at 450 W |
320 kV Reflection target | 320 kV | 320 W | 30 µm up to 30 W | 320 µm at 320 W |
Detectors | # Bits | Active pixels | Pixel Size | Max. frame rate at 1x1 binning |
Max. frame rate at 2x2 binning |
---|---|---|---|---|---|
Perkin Elmer 1611 | 16-bit | 4000 x 4000 | 100 µm | 3.75 fps | 7.5 fps |
Perkin Elmer 1620 | 16-bit | 2000 x 2000 | 200 µm | 3.75 fps | 7.5 fps |
Perkin Elmer 1621 EHS | 16-bit | 2000 x 2000 | 200 µm | 15 fps | 30 fps |
: Basic configuration
: Alternative configuration
Manipulator | |
---|---|
# Axes | 4 (optional 5th axis) |
Axes travel (Typical values - Exact values depend on system configuration) |
(X) 500 mm (Y) 610 mm (Z) 800 mm (Rotate) n*360 |
Max. sample weight | 100 kg |
General | |
---|---|
Cabinet dimensions (LxWxH) | 2695 mm x 1828 mm x 2249 mm |
Weight | 8,500 kg |
Safety | All systems are manufactured to IRR99 |
Control software | All systems are controlled by Nikon Metrology’s in-house Inspect-X software |