Controller |
Pro Scan III |
Computer Interface |
1 x USB 2.0 (HID or Virtual COM) 2 x RS232 |
Stage Speed |
Up to 300mm/s |
Step Size |
From 0.01um for XY, 0.002um for Z |
Repeatability (Focus/Stages) |
Typically <1um |
Linear Scales |
0.1um or 0.05um options available |
Ball Screws |
Zero Backlash, ground recirculation, ball screws, 1mm, 2mm, 4mm or 5mm options available. |
Limit Switches |
Adjustable in X and Y ,Optical and mechanical available in Z |
Dimensions |
177mm x 177mm x 177mm |
Controller Weight |
3kg (1kg for ancillary box) |