Max kV | 130 kV |
---|---|
Max. electron beam power | 10 W |
X-ray source | Open tube transmission target |
Focal spot size | 3 µm1 (below 2 W) |
Defect recognition capability | 2 µm |
Geometric magnification | 2,046x |
System magnification | Up to 36,000x |
Imaging system (Option) | Varex 1313DX (1 Mpixel, 16-bit) Flatpanel |
Manipulator | 4-axis (X, Y, Z, T) |
Rotate axis | Optional |
Tilt | 0 - 72 degrees |
Measuring volume | Largest square in single map 406x406 mm Absolute max 711x762 mm |
Max. sample weight | 5 kg (11 lbs) |
Monitor | Single 4k IPS (3840x2160 pixels) |
Cabinet dimensions (WxDxH) | 1200 x 1786 x 1916 mm |
Weight | 1,935 kg (4,266 lbs) |
Radiation safety | |
Control | Inspect-X control and analysis software |
Automation inspection | Optional |
Computed Tomography | Optional CT and/or X.Tract |
Applications | Real-time inspection of electronics (BGA, µBGA, flip-chip and loaded PCB boards) |