Microfocus source | Max. kV | Max. power | Focal spot size | Focal spot size | XT H 160 | XT H 225 |
---|---|---|---|---|---|---|
160 kV Reflection target | 160 kV | 225 W | 3 µm up to 7 W | 225 µm at 225 W | ||
180 kV Transmission target | 180 kV | 20 W | 1 µm up to 3 W | 20 µm at 20 W | ||
225 kV Reflection target | 225 kV | 225 W | 3 µm up to 7 W | 225 µm at 225 W |
Detectors | # Bits | Active pixels | Pixel Size | Max. frame rate at 1x1 binning |
Max. frame rate at 2x2 binning |
XT H 160 | XT H 225 |
---|---|---|---|---|---|---|---|
Varian 1313Dx | 16-bit | 1000 x 1000 | 127 µm | 30 fps | 60 fps | ||
Varian 2520Dx | 16-bit | 1900 x 1500 | 127 µm | 12.5 fps | 30 fps | ||
Varex 4343 | 16-bit | 2880 2880 | 150 µm | 15 fps | 30 fps | ||
Perkin Elmer 0820 | 16-bit | 1000 x 1000 | 200 µm | 7.5 fps | 15 fps |
: Basic configuration
: Alternative configuration
Manipulator | XT H 160/ XT H 225 |
---|---|
# Axes | 5 |
Axes travel (Typical values - Exact values depend on system configuration) |
(X) 185 mm (Y) 250 mm (Z) 625 mm (Tilt) +/- 30 (Rotate) n*360° |
Max. sample weight | 15 kg |
General | |
---|---|
Cabinet dimensions (LxWxH) | 1,830 mm x 875 mm x 1,987 mm |
Weight | 2,400 kg |
Safety | All systems are manufactured to IRR99 |
Control software | All systems are controlled by Nikon Metrology’s in-house Inspect-X software |